The service temperature of SiCN is expected to be in the range of 1,400 ��C, and could be originally shaped into http://www.selleckchem.com/products/carfilzomib-pr-171.html any form as a thermoset polymer [5].In this study, methods for shaping of polymer-derived SiCN ceramics into thin and thick films are described. Furthermore, the influence of parameters such as thermosetting and annealing temperatures on the properties of SiCN ceramics including hardness and reduced Young��s modulus, which are important for the construction of pressure sensors, are discussed.2.?Sensing Scheme OverviewThe need for a sensor for high temperature applications is emphasized by Andronenko et al. [6]. They proposed a hybrid processing method by embedding piezoresistive chromium strain gauge between two thin SiCN membranes for sensing Inhibitors,Modulators,Libraries pressure in high temperature Inhibitors,Modulators,Libraries environments.

MEMS-based flow direction and flow rate sensor based on eight curved cantilever beams arranged evenly in an octagonal manner is proposed by Lee et al. [7], where Inhibitors,Modulators,Libraries the air flow on the upper surface of the beam makes it deflect proportional to the flow. Leo et al. [8] have demonstrated experimentally a novel method for pressure sensing using an indirect drag effect. The sensor has a blocking element and a sensitive element. The function of the blocking element is to protect the slender sensitive elements against direct impingement of the flow. Hence, it is mandatory that the blocking element is thicker (as the blocking element withstands the force exerted by the flowing fluid) than the sensitive element (as thickness of the sensitive element determines the sensitivity of the sensor).

The sensitive element senses the pressure drop caused by the blocking element and relates Inhibitors,Modulators,Libraries that to the input flow velocity/dynamic pressure. Figure 1 shows the schematic diagram of the experimental setup (in macro scale using an aluminum sensitive Brefeldin_A element and steel blocking element) that was used to measure the dynamic pressure at room temperature conditions [8]. The air flow past the blocking element creates a pressure drop behind the blocking element. With the increase in the velocity of the air this pressure drop increases to a level wherein the sensitive element deflects towards the blocking element. This deflection could possibly be correlated to the air flow velocity or in turn dynamic pressure.Figure 1.The experimental schematic for dynamic pressure sensing [8].

The image of the tip of the cantilever sensitive element is reflected through the mirror (which does not produce any magnification) and deflection Gefitinib clinical trial was measured using a microscope (with a graduated eye piece). The gap between the blocking element and the sensitive element was maintained using a shim ring (of thickness ranging from 300�C500 microns)A numerical simulation was performed to understand the phenomenon using ANSYS CFX.